ST133CF/ST166CF/ST210CF-01 Cleanroom Robots

The Nachi ST series, specifically the ST133CF, ST166CF, and ST210CF-01 models, represent the pinnacle of cleanroom robots designed for handling heavy payloads with exceptional precision and care.

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SKU: ST133CF/166CF/210CF-01 Category:

The Nachi ST series, specifically the ST133CF, ST166CF, and ST210CF-01 models, represent the pinnacle of cleanroom robots designed for handling heavy payloads with exceptional precision and care.

Heavy loads

  • Maximum payload up to 210 kg, perfect for handling large panels.

Improved maneuverability

  • Faster with improved rigidity reduces cycle times and minimizes flexure and vibration.

Clean room compatible

  • ISO class 6 clean room compatibility for operating in clean room environments.

Easy operation

  • Teaching pendent with large LCD has color graphics that simplify and clarify operations to greatly reduce Robot Programming times.

 

Operating envelope


ST133CF, ST166CF, and ST210CF-01 models
ST133CF, ST166CF, and ST210CF-01 models

 

(*1) The specifications are subject to changes without notice.
(*2) In case that an end user uses this product for military purpose or production of weapon, this product may be liable for the subject of export restriction stipulated in the Foreign Exchange and Foreign Trade Law. Please go through careful investigation and necessary formalities for export.

ST133CF, ST166CF, and ST210CF-01  Specifications


Robot model ST133CF-01 ST166CF-01 ST210CF-01
Construction Articulated construction
Number of axes 6
Drive system AC servo system
Max. operating area Arm J1 Swivel +/-2.88rad
J2 Forward/
backward
-1.40 to +1.05rad
J3 Upward/
downward
+2.62 to -2.40rad
Wrist J4 Rotation2 +/-6.28rad
J5 Bending +/-2.36rad +/-2.27rad
J6 Rotation1 +/-6.28rad
Max. speed Arm J1 Swivel 2.27rad/s 1.92rad/s 1.75rad/s
J2 Forward/
backward
2.27rad/s 1.92rad/s 1.57rad/s
J3 Upward/
downward
2.27rad/s 1.92rad/s 1.66rad/s
Wrist J4 Rotation2 4.01rad/s 2.97rad/s 2.27rad/s
J5 Bending 4.01rad/s 2.97rad/s 2.27rad/s
J6 Rotation1 5.32rad/s 4.54rad/s 3.49rad/s
Max. Payload Wrist 133kg 166kg 210kg
Forearm*1 Max .70kg
Allowable static load
torque of wrist
J4 Rotation2 745N·m 951N·m 1337N¥m
J5 Bending 745N·m 951N·m 1337N¥m
J6 Rotation1 411N·m 490N·m 720N¥m
Max. allowable moment
of inertia of wrist*2
J4 Rotation2 60.9kg·m2 88.9kg·m2 141.1kg¥m2
J5 Bending 60.9kg·m2 88.9kg·m2 141.1kg¥m2
J6 Rotation1 30.2kg·m2 45.0kg·m2 79.0kg¥m2
Position repeat accuracy*3 +/-0.06mm
Cleanliness ISO 14644-1 CLASS 6 compliant
Ambient temperature 10 to 45°C
Installation parameters Floor mounted
Robot mass 1120kg 1160kg

Additional Benefits:

  • High Precision: Achieve accurate and controlled movements for safe and reliable handling of critical components.
  • Rugged Construction: Built to withstand the demanding conditions of cleanroom environments.
  • Advanced Control System: Ensures smooth operation and minimizes stress on the robot and handled objects.
  • Safety Features: Protects workers and equipment with built-in safety mechanisms.

Ideal Applications:

  • Semiconductor Manufacturing: Handle delicate wafers, masks, and other sensitive components with utmost care.
  • Flat Panel Display (FPD) Manufacturing: Efficiently handle large and heavy glass substrates throughout the production process.
  • Medical Device Manufacturing: Ensure precise and clean handling of critical medical components.
  • Optoelectronics Manufacturing: Safely and precisely handle delicate optical components.

1[rad]=180/π[°]  1[N·m]=1/9.8[kgf·m]
(*1) Varies according to wrist load conditions and installation position.
(*2) Note that wrist moment of interia varies depending on wrist and conditions.
(*3) JIS B 8432 compliant.

 

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